Abbasi, M., Karami Mohammadi, A. (2013). Study of the size-dependant vibration behavior of an AFM microcantilever with a sidewall probe. Journal of Simulation and Analysis of Novel Technologies in Mechanical Engineering, 6(1), 11-22.
M. Abbasi; A. Karami Mohammadi. "Study of the size-dependant vibration behavior of an AFM microcantilever with a sidewall probe". Journal of Simulation and Analysis of Novel Technologies in Mechanical Engineering, 6, 1, 2013, 11-22.
Abbasi, M., Karami Mohammadi, A. (2013). 'Study of the size-dependant vibration behavior of an AFM microcantilever with a sidewall probe', Journal of Simulation and Analysis of Novel Technologies in Mechanical Engineering, 6(1), pp. 11-22.
Abbasi, M., Karami Mohammadi, A. Study of the size-dependant vibration behavior of an AFM microcantilever with a sidewall probe. Journal of Simulation and Analysis of Novel Technologies in Mechanical Engineering, 2013; 6(1): 11-22.
Study of the size-dependant vibration behavior of an AFM microcantilever with a sidewall probe
1Lecturer, , Mech. Eng., Islamic Azad Univ., Shahrood Branch
2Assis. Prof., Mech. Eng., Shahrood Univ. of Tech., Shahrood, Iran
Abstract
In this paper, the resonant frequency and sensitivity of an atomic force microscope (AFM) with an assembled cantilever probe (ACP) are analyzed utilizing the modified couple stress theory. The proposed ACP comprises a horizontal microcantilever, an extension and a tip located at the free end of the extension, which make AFM capable of scanning the sample sidewall. First, the governing differential equation and boundary conditions for dynamic analysis are obtained by a combination of the basic equations of the modified couple stress theory and Hamilton principle. Then, a closed form expression for the resonant frequency are derived, and using this expression the sensitivity are also investigated. The results of the proposed model are compared with those of the classic beam theory. The comparison shows that the difference between the results predicted by these two theories becomes significant when the horizontal cantilever thickness comes approximately close to the material length scale parameter, in which for some values of contact stiffness the difference reaches its maximum. It can also be inferred that a decrease in the microcantilever thickness could have a knock on effect on the shifts of first frequency and first sensitivity caused by an increase in the extension length.
Article Title [Persian]
بررسی رفتار ارتعاشی وابسته به اندازه برای تیر میکروسکوپ نیرو اتمی با رابط عمودی جهت روبش جداره
Authors [Persian]
محمد عباسی, اردشیر کرمی محمدی
Abstract [Persian]
در این مقاله، فرکانس تشدید و حساسیت ارتعاشات یک نوع تیر مونتاژ شده میکروسکوپ نیرو اتمی با استفاده از روش تنش- کوپل اصلاح شده مورد بررسی قرار گرفته است. تیر مذکور شامل یک تیر یک سردرگیر افقی، یک رابط عمودی و یک نوک در انتهای سر آزاد رابط بوده که ساختار آن امکان روبش جدارههای نمونه نانو را برای میکروسکوپ نیرو اتمی فراهم میسازد. ابتدا با استفاده از تئوری تنش-کوپل اصلاح شده و بهرهگیری از اصل هامیلتون، معادله حرکت و شرایط مرزی، برای میکروتیر مذکور بدست آمده است. سپس رابطهای برای فرکانس میکروتیر مورد نظر استخراج شده که به کمک آن حساسیت ارتعاشات نیز مورد تحلیل قرار گرفته است. نتایج حاصل از تئوری تنش-کوپل اصلاح شده با نتایج بدست آمده از تئوری تیر کلاسیک مقایسه شده است. نتایج نشان میدهد که با نزدیک شدن ضخامت تیر به پارامتر طول مقیاس، اختلاف بین دو تئوری مذکور افزایش یافته و برای برخی از مقادیر سختی تماسی به حداکثر مقدار خود میرسد. همچنین معلوم شد که در مد اول ارتعاشات، کاهش ضخامت تیر و نزدیکتر شدن آن به پارامتر طول مقیاس، بر تغییرات فرکانس و تغییرات حساسیت که خود ناشی از تغییرات طول رابط نسبت به طول تیر میباشند، اثرگذار است
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